Practical Electron Microscopy and Database

Due to ion irradiation, secondary electrons (SEs) can be emitted from materials surfaces. The energy distribution dδ/dE and the yield δ of SEs emitted via the kinetic process from metal surfaces by low-energy ion irradiation. The emission process are consisted of three steps:
        i) The excitation of a degenerate electron gas by incident ions.
        ii) The propagation of excited SEs to the surface.
        iii) Their escape from the surface potential.

Figure 4796 shows that the possible ion beam - matter interactions induce particle sputtering from a solid surface, resulting in the generation of SEs.