Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Electron Beam Distortion in Electron Microscopes

In a variable pressure, gaseous environment, and low vacuum electron microscopes (SEM and TEM), the beam distortions can be reduced or eliminated by introducing a gas into the specimen chamber [1–4].

 

 

 

 

 

[1] V.N.E. Robinson, J. Phys. E 8 (1975) 638.
[2] L.B. Harris, D.A. Moncrieff, V.N.E. Robinson, Phys. Status Solidi A 35 (1976) 371.
[3] A.N. Farley, J.S. Shah, J. Microsc. 164 (1991) 107.
[4] G.D. Danilatos, Adv. Electron. Electron Phys. 71 (1988) 109.