Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Glossary of Terms - Electron Microscopy

Glossary of Terms

SEM (Scanning Electron Microscope)

An electron microscope that scans a focused beam of electrons across a sample's surface to create an image.

TEM (Transmission Electron Microscope)

A microscopy technique where a beam of electrons is transmitted through an ultra-thin specimen, interacting with the sample as it passes through.

EELS (Electron Energy Loss Spectroscopy)

A technique that measures the change in energy of electrons as they pass through a material, providing information about the electronic structure, bonding, and elemental composition of the sample.

EDS (Energy-Dispersive X-ray Spectroscopy)

An analytical technique used for the elemental analysis or chemical characterization of a sample.

STEM (Scanning Transmission Electron Microscope)

A type of TEM where the electron beam is focused into a narrow spot that is scanned over the sample in a raster pattern.

FIB (Focused Ion Beam)

A technique used particularly in the semiconductor industry for site-specific analysis, deposition, and ablation of materials.

AFM (Atomic Force Microscopy)

A type of scanning probe microscopy with a very high resolution, used to measure the force between a sharp probe and the sample surface.