Practical Electron Microscopy and Database

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Comparison between Hexagonal and C54

The crystallographic cell of metal disilicides is represented in Figure 972, projected on the close-packed hexagonal plane. For C54, only a slight distortion makes the structure orthorhombic: the angle between the hexagonal axes is changed to 121° instead of 120°. Figure 972. Two dimensional atomic arrangement in die stacking plane for the C54, C40 and C11b. [1]                       [1] A. Mouroux, Understanding the formation of TiSii in the presence of refractory metals for Si technology, Acta Univ. KTH (Stockholm, Sweden, 1999).