Practical Electron Microscopy and Database

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Techniques for Silicides' Analysis

Table 997. Techniques for silicides' analysis. Silicides TEM Electron diffraction (ED) XRD EDS CoxSiy CoxSiy TEM ED of cobalt silicides XRD of cobalt silicides   CrxSiy CrSix TEM       Cu3Si         DySix DySix TEM       ErSix   ErSix ED     α-FeSi2 Iron silicide TEM       β-FeSi2       GdSix GdSix TEM GdSix ED     HfSi         IrSi         MnSi         MnSi2-x         MnSi2         Mn11Si19         Mo5Si3 TEM imaging of molybdenum silicides       MoSi2 (C11b)       MoSi2 (C40)       MoSi2       Nb/Nb5Si3         Nb5Si3 (D8b)         NbSi2         NbSi2 (C11b)         NbSi3         Ni2Si Nickel silicide TEM ED of nickel silicides XRD of nickel silicides   NiSi   NiSi2   Nickel silicide Extracted the composition of Si-rich nickel silicide: Ni0.23Si0.77 and NiSi2 [1] Pd2Si   ED of palladium silicides XRD of palladium silicides   PtSi         ReSi2 (C11b) ReSix TEM ReSix ED     RhSi         Ta5Si3 (C40)         Ta5Si3         TaSi2(C40)         Ti5Si3 (D8m) Titanium silicide TEM ED of titanium silicide XRD of titanium silicides   Ti5Si3   Ti/Ti5Si3   TiSi2 (C49)   TiSi2 (C54)   V3Si         VSi2 (C11b)         VSi2(C40)         W5Si3         WSi2 (C40)         WSi2 (C11b)         YbSix   YbSix ED     ZrSi2 ZrSix TEM                       [1] Hou-Yu Chen, Chia-Yi Lin, Min-Cheng Chen, Chien-Chao Huang, and Chao-Hsin Chien, Nickel Silicide Formation using Pulsed Laser Annealing for nMOSFET Performance Improvement, Journal of The Electrochemical Society, 158 (8) H840-H845 (2011).