Electron microscopy
 
Histogram for Wafer Analysis
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Histogram of analysis of wafer map failure patterns. Based on the histogram patterns, the edge-ring, center, donut, edge-loc and loc patterns can be differentiated from random and scratch patterns. However, the random and scratch pattern cannot be separated as shown in Figure 4268. code:          
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Edge-ring
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(a.A)
(a.B)
(a.C)
Center Remove an item/element from a list Remove an item/element from a list Remove an item/element from a list
(b.A)
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(b.C)
Donut Remove an item/element from a list Remove an item/element from a list Remove an item/element from a list
(c.A)
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Edge-loc Remove an item/element from a list Remove an item/element from a list Remove an item/element from a list
(d.A)
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Loc Remove an item/element from a list Remove an item/element from a list Remove an item/element from a list
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Random Remove an item/element from a list Remove an item/element from a list Remove an item/element from a list
(f.A)
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(f.C)
Scratch Remove an item/element from a list Remove an item/element from a list Remove an item/element from a list
(g.A)
(g.B)
(g.C)
Figure 4268. (a) Typical examples of wafer map failure patterns, (b) Projection results following the Radon transform given by the program and described below, and (c) Histograms.

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Histogram for wafer analysis. code:          
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