Defect Size Distribution

Defect Size Distribution
- Integrated Circuits and Materials -
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Defect size distribution varies depending on process lines, process time, learning experience gained, and others. In general, the defect size pdf (probability density function) is defined as, [1]
          defect size pdf (probability density function) ------------------------ [4313]
where,
          x₀ -- The critical size of the defect with the highest probability of occurrence, which must be smaller than the minimum width or spacing of the defect monitor, s₀. [2]
          p ≠ 1.
          q > 0.
          c = (q+1)(p-1)/(q+p)

Note that the defects smaller than x₀ can not be resolved well by the optics in the photolithographic process. [3]

Defect size probability density function

Figure 4313. Defect size probability density function. [1]

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[1] Way Kuo, Wei-Ting Kary Chien and Taeho Kim, Reliability, Yield, and Stress Burn-In: A Unified Approach for Microelectronics Systems Manufacturing & Software Development, 1998.
[2] Stapper, C.H., "Modeling of integrated circuit defects sensitivities," IBM Journal of Research and Development, 27, 1983, pp 549-557.
[3] Stapper, C.H., "Modeling of defects in integrated circuit photolithographic patterns," IBM Journal of Research and Development, 28, 1984, pp 461-475.

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