Electron microscopy
 
Dynamic Analysis by Laser Stimulation (DALS)
- Integrated Circuits -
- An Online Book -
Integrated Circuits                                                                                   http://www.globalsino.com/ICs/        


=================================================================================

 

 

Dynamic analysis by laser stimulation (DALS) is a method to analyze device operation conditions by means of laser radiation. In this technique, a device is stimulated with a 1.3 μm laser while operating it with test patterns by LSI tester. And then, device operation status (pass/fail) changes due to heat generated by the laser. Therefore, the pass/fail signal change is expressed as an image that indicates the point causing timing delay, marginal defect, etc.

Dynamic analysis by laser stimulation (DALS)

Figure 4920. Dynamic analysis by laser stimulation (DALS). [1]

 

 

 

 

 

 

 

[1] Overview of function of iPHEMOS series.

 

 

=================================================================================