Statistical CD Measurements Based on Analytical TEM Techniques and DM Scripting and its Application on PFA Analysis of IC Devices

TEMautoReporting—Automation of Elemental Analysis and TEM Reporting with Graphical User Interface

Automated classification of PowerPoint reports and recommendation of failure modes using Naïve Bayes machine learning algorithm

Automated classification of Powerpoint reports and recommendation of failure modes using text-based machine learning algorithm

Automated algorithm of die filter for PFA sampling

Review of Practical Problem Solving for Advanced Semiconductor Industry