Microanalysis Methods
Analysis Techniques
Overview of Analytical Techniques for Dopant Evaluation and Structural Characterization
1. Structural Characterization
1.1. Point Defect Evaluation Chemical etching technique Scanning capacitance microscopy Deep-level transient spectroscopy
1.2. Evaluation of Dislocation and Other Defects Electron microscopy Chemical etching techniques
2. Dopant and Impurity Evaluation
2.1 Methods Based on Chemical Techniques Transmission electron microscopy Atomic force microscopy Scanning electron microscopy
2.2. Methods Based on Electrical Techniques Capacitance-voltage technique and SCM Spreading resistance profiling and SSRM
2.3. Secondary Ion Mass Spectroscopy
2.4. Scanning Electron Microscopy
Contact the author: Feedback
Other readings: