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Anisotropic Wet-Etching
- Practical Electron Microscopy and Database - - An Online Book - |
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| Microanalysis | EM Book https://www.globalsino.com/EM/ | ||||||||
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The etch rate of anisotropic etch depends on the etching direction. The main etching solutions for anisotropic chemical etching of Si are KOH, EDP (Ethylene Diamine Pyrochatechol), TMAH (Tetra Methyl Ammonium Hydroxide), N2H4, NaOH, CsOH, etc.
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