Comparison between Various SIMS
- Practical Electron Microscopy and Database -
- An Online Book -

http://www.globalsino.com/EM/  



 

 

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  Static SIMS TOF-SIMS Dynamic SIMS
 
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Flux
< 1013 ions/cm2 (per experiment)   ~1017 ions/cm2 (minimum dose density)
Lateral resolution
Down to below 100 nm 60 nm Probe mode: 200 nm; Microscope mode: 1 µm
Sampling depth
Outer 1 to 2 monolayers 1Å – 3 nm Depth resolution 2-30 nm (10 monolayers)
Range of elements
All
Quantification
Standard Required
Mass range
Typically up to 1000 amu 10000 amu  
Information
Elemental + molecular   Elemental
Molecular Information
  Some functional groups, Molecular weight, Polymer repeat unit, Unique mass fragments  
Chemical bonding
Yes   In rare cases only
Detection Limit
1 ppm
ppb (for some elements) - ppm
Destructive
Yes, if sputtered long enough   Yes, material removed during sputtering
Accuracy
    2 %
Type of analysis
Surface mass spectrum, 2D surface ion image  

Depth profile (probe into µm below surface), mass spectrum, 3D image depth profile

Sample requirements
Solid; vacuum compatible
Sample damage Minimal   Destructive in analyzed area (up to 500 µm per area)
Main application
Surface chemical analysis, organics, polymers    

 

 

 

 

 

 

 

 

 

 

 

 

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