Periodic Table for SIMS Measurement and Detection Limits of SIMS

Periodic Table for SIMS Measurement
& Detection Limits of SIMS
Practical Electron Microscopy and Database
- An Online Book -

Microanalysis | EM

https://www.globalsino.com/

Table 1253a. Recommended primary ions for SIMS measurements.

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18

1 2

H He

3 4
O⁻

Cs⁺
5 6 7 8 9 10

Li Be
Note: i) Noble gases do not ionize; ii) Nitrogen in carbon bearing phase: CN⁻.
B C N O F Ne

11 12 13 14 15 16 17 18

Na Mg Al Si P S Cl Ar

19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36

K Ca Sc Ti V Cr Mn Fe Co Ni Cu Zn Ga Ge As Se Br Kr

37 38 39 40 41 42 43 44 45 46 47 48 49 50 51 52 53 54

Rb Sr Y Zr Nb Mo Tc Ru Rh Pd Ag Cd In Sn Sb Te I Xe

55 56 71 72 73 74 75 76 77 78 79 80 81 82 83 84 85 86

Cs Ba {57-70} Lu Hf Ta W Re Os Ir Pt Au Hg Tl Pb Bi Po At Rn

87 88 103 104 105 106 107 108 109 110 111 112 114

Fr Ra [89-102] Lr Rf Db Sg Bh Hs Mt Ds Uuu Uub Uuq

57 58 59 60 61 62 63 64 65 66 67 68 69 70

{lanthanides} {57-70} La Ce Pr Nd Pm Sm Eu Gd Tb Dy Ho Er Th Yb

89 90 91 92 93 94 95 96 97 98 99 100 101 102

{actinides} [89-102] Ac Th Pa U Np Pu Am Cm Bk Cf Es Fm Md No

Table 1253b. Detection Limits: in InP, GaAs, GaN (atoms/cm³).

1	2		3	4	5	6	7	8	9	10	11	12	13	14	15	16	17	18
1																		2
H 2E18 2E17	Electropositive elements: Green, and electronegative elements: Yellow																	He
3	4												5	6	7	8	9	10
Li 3E13 1E16	Be 3E14 1E20	Upper: M⁺(O₂⁺) Lower: M^-(Cs⁺)											B 1E15 3E15	C 2E18 1E16	N 5E18 5E15 (NGa-)	O 1E20 1E16	F 5E16 2E14	Ne
11	12												13	14	15	16	17	18
Na 3E14 2E17	Mg 1E14 1E20												Al 2E15 1E17	Si 1E16 2E15	P 1E16 2E15	S 1E19 1E15	Cl 2E17 3E15	Ar
19	20		21	22	23	24	25	26	27	28	29	30	31	32	33	34	35	36
K 2E14 2E18	Ca 3E14 1E20		Sc	Ti 2E14 1E18	V 1E14 1E17	Cr 1E15 2E17	Mn 3E14 1E18	Fe 1E15 3E17	Co	Ni 1E16 5E17	Cu 3E16 1E16	Zn 1E16 1E20	Ga	Ge 2E16 5E15	As	Se 2E17 5E14	Br 1E17 5E13	Kr
37	38		39	40	41	42	43	44	45	46	47	48	49	50	51	52	53	54
Rb	Sr 5E15 1E20		Y 1E17 1E20	Zr 1E15 4E17	Nb 1E16 1E18	Mo 1E16 1E18	Tc	Ru	Rh	Pd	Ag 2E16 2E16	Cd 5E16 1E21	In 3E15 3E17	Sn	Sb	Te 2E17 1E15	I	Xe
55	56		71	72	73	74	75	76	77	78	79	80	81	82	83	84	85	86
Cs	Ba	{57-70}	Lu	Hf	Ta	W	Re	Os	Ir	Pt	Au 1E17 1E15	Hg	Tl	Pb	Bi	Po	At	Rn
87	88		103	104	105	106	107	108	109	110	111	112		114
Fr	Ra	[89-102]	Lr	Rf	Db	Sg	Bh	Hs	Mt	Ds	Uuu	Uub		Uuq

			57	58	59	60	61	62	63	64	65	66	67	68	69	70
{lanthanides} {57-70}			La	Ce	Pr	Nd	Pm	Sm	Eu	Gd	Tb	Dy	Ho	Er	Th	Yb
			89	90	91	92	93	94	95	96	97	98	99	100	101	102
{actinides} [89-102]			Ac	Th	Pa	U	Np	Pu	Am	Cm	Bk	Cf	Es	Fm	Md	No