Electron microscopy
 
CF4 gas
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   http://www.globalsino.com/EM/        


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CF4 gas is used for passivation (Si3N4 and SiO2) etch or photo-resist strip (PRS) by using a mixture of O2 and CF4 gases.

 

 

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