EDS Measurements of Boron (B)
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In many cases, boron (B) measurement with EDS systems is problematic because of limitation of detector sensitivity or specimen structure.

Figure 1381 shows the percentage of x-ray transmitted through an H2O-ice contamination layer depending on the thickness of the H2O-ice layer up to 1 μm. As expected, the absorption effect of ice layer is greatest for the low-energy boron x-rays and the least for the silicon signal. Such H2O-ice layer is normally formed in cryo-TEM measurements.

Calculated percentage absorption of characteristic x- rays in an H2O-ice contamination layer

Figure 1381. Calculated percentage absorption of characteristic x- rays in an H2O-ice contamination layer. [1]. X-ray energies: B-K = 183 eV, C-K = 277 eV, O-K = 525 eV, N-K = 392 eV and Si-K = 1.739 keV.

 

 

 

 

 

 

 

 

 


         

 

 

 

 

 

 

 


[1] M. Malac and R.F. Egerton, Calibration Specimens for Determining Energy-Dispersive X-ray k-Factors of Boron, Nitrogen, Oxygen, and Fluorine, Microsc. Microanal. 5, 29–38, (1999).
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