|
Table 1405. Examples of SEM/STEM systems.
|
Model (brand and full name) |
Type |
Additional information |
FEI |
|
Quanta 200 3D DualBeam FIB |
FIB/SEM |
|
|
Quanta 200 |
ESEM |
|
|
Philips XL 30 CP |
SEM |
|
|
Philips XL30 SEM |
SEM |
|
|
NanoSEM 230 |
SEM |
|
|
Helios NanoLabâ„¢ 600i |
FIB/SEM |
|
|
Nova Nanolab 200 DualBeam FIB |
FIB/SEM |
|
|
xP200 Focused Ion Beam |
FIB |
|
Hitachi |
|
Hitachi 4300 |
SEM |
|
|
Hitachi S-4500 |
FESEM |
|
|
Hitachi S-4800 |
SEM |
|
|
Hitachi S-900 |
SEM |
Field-emission (In-lens) |
|
Hitachi S3400N |
SEM |
Tungsten gun |
Zeiss |
|
Zeiss EVO-50 (Quemscan) |
SEM |
|
|
Zeiss 1555 VP |
SEM |
|
|
Zeiss UltraPlus |
FESEM |
|
|
Zeiss Auriga Cross Beam |
FIB/SEM |
|
JEOL |
|
JSM 890 SEM |
FESEM |
|
|
JCM-5000 Neoscope (x2) |
SEM |
|
|
JSM-7001F |
SEM |
|
|
JSM 6300F SEM |
FESEM |
|
|
JSM-6610 |
SEM |
|
|
JSM 6400 |
SEM |
|
|
JSM 6460LA |
SEM |
|
|
JSM-7001F |
FESEM |
Super Hybrid Lens |
|
JXA-8500F Hyperprobe |
EPMA |
|
Others |
|
Cambridge S360 |
SEM |
|
|
|