Electron microscopy
 
Development History of SEM Technique
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Table 1762. Milestone of SEM development.
DATE
NAME
MILESTONE
1924
de Broglie High-speed electrons exist as waves
Mid-1930s
Knoll Designed a microscope in which its electron probe could be simultaneously
scanned over a specimen surface and synchronized with a cathode ray tube
(CRT) to produce an image
1960
Everhart and Thornley [1] Developed a more efficient secondary electron detector for the SEM
1965
  Commercial SEM
Mid-1980s
  Personal computers (PCs) were used to control slow speed CCD cameras in EMs
1990s
  Developed temperature-controlled stages in combination with variable pressure SEMs (VPSEM) to study electron-beam-sensitive materials more easily (environmental SEM)

 

 

 

 

[1] Goldstein JI, Newbury DE, Joy DC, Lyman CE, Echlin P, Lifshin E, Sawyer L, Michael JR (2003) Scanning electron microscopy and X-ray microanalysis. Plenum, New York.

 

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