Introduction of Ionic Sputtering Yields
- Practical Electron Microscopy and Database -
- An Online Book -

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This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
 

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Figure 2452 shows the dependence of ionic sputtering yields on ion energies. The incident ions (Au, Nd, In, Ga, Co, Si, N, and Li) are normal to the silicon (Si) target surface.

The dependence of ionic sputtering yields on ion energies

Figure 2452. The dependence of ionic sputtering yields on ion energies. The target material is silicon.

 

 

 

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