Mobile Charges in SiO2 Field Insulator in MOS Structures
- Practical Electron Microscopy and Database -
- An Online Book -  

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


In MOSFET structures, copper diffusion into the SiO2 field insulator can also induce mobile charges, resulting in transistor parameter shifts [1,2].






[1] A. Mesli, T. Heser, Phys. Rev. B 45(20) (1992) 11632.
[2] F. Braud, J. Torres, J. Palleau, J.L. Mermet, C. Marcadal, E. Richard, Proceedings 1996 13th VMIC (1996) 174.




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