Electron microscopy
 
Widths of X-ray Peaks in EDS Measurement
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   http://www.globalsino.com/EM/        

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The widths of X-ray peaks in EDS measurements are determined by the energy resolution of the detector, the other components of the EDS system, including X-ray processing circuits (preamplifier, pulse processor, energy to digital converter and multi-channel analyser), data management system (software), and the specimen. The practical peak width (FWHM) in EDS is typically 150 eV even though the natural X-ray peak width is approximately 2 eV. Therefore, it is difficult to resolve two peaks separated by less than about 100 eV.

 

 

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