Electron microscopy
Lateral Ranges of Probe Ions in FIB and SIMS Measurements
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Lateral resolution of FIB is determined by two factors:
         i) the smallest ion probe achievable in a given FIB,
         ii) the lateral range of probe ions in the material.

Table 1173. Estimated lateral ranges of ions.

Sample material Lateral range (nm) Ion beam Reference
Al 7 30 keV Ga [1]
Ti 7 30 keV Ga [1]
Si 3 30 keV Ga [1]








[1] Lucille A. Giannuzzi and Fred A. Stevie, INTRODUCTION TO FOCUSED ION BEAMS: Instrumentation, Theory, Techniques and Practice, 2005.