Thickness uncertainties in TEM/STEM samples are:
i) Hard to control TEM/STEM sample thickness to a specific value in sample preparations.
ii) Curtaining effect in TEM sample preparation due to different materials in the structures.
iii) There has been interest in determining the three-dimensional distribution of elements by using elemental mapping in tomography, in which elemental maps are acquired in a tilt series, typically through ±70° [1-2]. For specimens tilted to 70°, the specimen thickness in the beam direction effectively triples.
Table 1217a. Thickness dependence of electron scattering from a specimen in EM (electron microscope) measurements. |
Scattering direction |
EM method |
Scattering event/angle |
Scattering direction |
Electrons |
Wave (phase) property |
Electron property |
Contrast interpretation |
Thin specimen |
TEM |
Less scattering events and then smaller scattering angle
|
Forward
scattering |
More electrons |
Strong coherent signal |
Strong wave property |
Easy |
|
Back scattering |
Fewer electrons |
Weak incoherent signal |
Weak particle property |
|
Thick specimen |
TEM/SEM |
|
Forward
scattering |
Fewer electrons |
Weak coherent signal |
Weak wave property |
Middle |
Electron is scattered more than once (plural scattering), and then scattering angle is greater |
Back scattering |
More electrons |
Strong incoherent signal |
Strong particle property |
|
Very thick or bulk specimen |
SEM |
More scattering events and then greater scattering angle |
Forward
scattering |
Fewest electrons |
Weakest coherent signal |
Weakest wave property |
Difficult |
Electron is scattered >20 times
(multiple scattering), and then scattering angle is greatest |
Back scattering |
Most electrons |
Strongest incoherent signal |
Strongest particle property |
|
Table 1217b. Optimized sample thickness for various TEM measurements. |
Technique |
Quality |
Thickness range |
Resolution |
TEM |
Good |
≤50 nm |
Tool resolution |
Applicable |
50 ~ 70 nm |
|
HRTEM |
Best |
10 ~ 25 nm |
Tool resolution |
Applicable |
25 ~ 100 nm |
|
(ADF-)STEM |
Best |
25 ~ 50 nm |
≤ 0.3 nm |
Applicable |
50 ~
90 nm |
≤
1.2 nm |
TEM + DSE* |
Applicable |
200 ~ 600 nm |
|
CBED for strain analysis |
Applicable |
200 ~ 500 nm |
|
Holography |
Applicable |
150 ~ 300 nm |
|
EFTEM/EELS |
Best |
25 ~ 50 nm (depending on V and Z)** |
0.3 ~ 0.5 nm |
Ok |
50-100 nm |
|
EDS |
Applicable |
50~100 nm |
1 ~ 2 nm |
* Dopant selective etching.
** V: Beam energy, Z: atomic number. |
[1] Midgley PA, Weyland M. Ultramicroscopy 2003; 96:413.
[2] Leapman RD, Kocsis E, Zhang G, Talbot TL, Laquerriere P. Ultramicroscopy 2004;100:115.
|