Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Practical Electron Microscopy and Database - An Online Book

Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix

Bandgap Energies of Dielectrics

Table 2076. Static dielectric constant (K), band gap energies, and conduction band (CB) offsets of the gate dielectrics on Si (silicon) substrate.

Gate dielectrics
K
Band gap energy (eV)
CB offsets (eV)
Gate dielectrics
K
Band gap energy (eV)
CB offsets (eV)
Si
1.1
Si3N4
7
5.3
2.4
SiO2
3.9
9
3.2
Al2O3
9
8.8
2.8
Ta2O5
22
4.4
0.35
TiO2
60
3.5
0
SrTiO3
2000
3.2
0
ZrO2
25
5.8
1.5
HfO2
25
5.8
1.4
HfSiO4
11
6.5
1.8
La2O3
30
6
2.3
Y2O3
15
6
2.3
a-LaAlO3
30
5.6
1.8

Figure 2076 shows the distribution of band gap versus dielectric constant of dielectrics.

Distribution of band gap versus dielectric constant of dielectrics

Figure 2076. Distribution of band gap versus dielectric constant of dielectrics.

 

 

 

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