Electron microscopy
 
Public Datasets for Wafer Map Analysis
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Table 4232. Public datasets for wafer map analysis.

Dataset Function Reference
WM-811K binary WBM dataset The real-world wafer map dataset consists of wafer maps with information about the wafer map, number of dies, lot name, wafer index in each lot, training or test set label and failure pattern type.
page4236
Synthesized multi-GFA multi-beam wafer bin map dataset This dataset contains 1050 multi-pattern multi-bin wafer bin maps (WBMs) synthesized from WM-811K binary WBM dataset and real world multi-bin WBMs using a trained pix2pix model. Link

 

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