Global Defects and Local Defects Identified by Defect Denoising - Python for Integrated Circuits - - An Online Book - |
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Python for Integrated Circuits http://www.globalsino.com/ICs/ | ||||||||
Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix | ||||||||
================================================================================= Defect denoising is a procedure to determine whether input defect data consist of any local defect clusters and, if local defects exist, to separate the local defects from the global defects. This can be done by “automatic defect detection”, [1] by using a variety of different methods: ============================================
[1] C. H. Wang, W. Kuo, and H. Bensmial, “Detection and classification of
defects patterns on semiconductor wafers,” IIE Trans., vol. 39, no. 12,
pp. 1059–1069, 2006.
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