Chapter/Index: Introduction | A | B | C | D | E | F | G | H | I | J | K | L | M | N | O | P | Q | R | S | T | U | V | W | X | Y | Z | Appendix
| Defect-Limited Yield (DLY) refers to the proportion of semiconductor devices on a wafer that function correctly, considering the impact of manufacturing defects. It quantifies yield loss due to defects introduced during the fabrication process, such as particle contamination, lithography errors, or material imperfections. DLY is a critical metric for evaluating process efficiency and defect density in semiconductor manufacturing.
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