Density-functional Theory (DFT) Simulations of EELS Profiles
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Figure 129 shows experimental EEL spectra of the N (nitrogen) K edge obtained from a GaN film with the three different energy resolutions versus the DFT simulations with the indicated energy broadening. The spectrum with an energy resolution of 1.0 eV was obtained with the JEOL2010F, the spectrum with the resolution of 0.4 eV was obtained with the Cs-corrected Nion VG HB501, and the 0.2 eV spectrum by using the monochromated FEI Tecnai G2. Those profiles indicate the EELS sensitivity to the detection of extended energy loss fine structure (EXELFS) depending on the energy resolution.

Experimental EEL spectra of the N (nitrogen) K edge from a GaN film obtained with the three different energy resolutions versus the DFT simulations with the indicated energy broadening

Figure 129. Experimental EEL spectra of the N (nitrogen) K edge from a GaN film obtained with the three different energy resolutions versus the DFT simulations with the indicated energy broadening. [1]

 

 

[1]  R.F. Klie, I. Arslan, N.D. Browning, Atomic resolution electron energy-loss spectroscopy, Journal of Electron Spectroscopy and Related Phenomena 143 (2005) 105–115.

 

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