Electron microscopy
 
CMOS Failure Mechanisms in FinFET Technology
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Table 1294. CMOS failure mechanisms in FinFET technology.

FinFETs Node Test polarity Failure mechanism [1]
MOSFET 65 nm Positive FinFET drain [1]
Drain-to-source Molten silicon [1]
45 nm Positive FinFET drain [1]
Drain-to-source Molten silicon [1]
32 nm Positive FinFET drain [1]
Drain-to-source Molten silicon [1]
Diode-configured FinFET 65 nm Positive FinFET fin region [1]
Drain-to-source [1]
45 nm Positive FinFET fin region [1]
Drain-to-source [1]
32 nm Positive FinFET fin region [1]
Drain-to-source [1]
FinFET   Positive p+/n+ fin region [1]
p-n gated diode   Anode-to-cathode Uniform conduction [1]

 

 

 

 

 

 

 

 

 

 

 

 

[1] Steven H. Voldman, ESD: Failure Mechanisms and Models, 2009.

 

 

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