X-ray Absorption Induced by Carbon Contamination
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The intensities of low energy X-rays in EDS measurements can be reduced by the X-ray absorption in carbon contaminants on the EM specimens (see Figure 1730). All their intensities decrease with the thickness of the carbon contaminants due to X-ray absorption except for carbon itself. The intensity of carbon X-ray increases due to the increase of its thickness. Table 1730 lists their k-ratios affected by 10 nm layer of carbon contaminants as a function of the accelerating voltage of the electron beam.

Table 1730. k-ratios affected by 10 nm layer of carbon contaminants. [1]

E0 (kV) B Kα N Kα O Kα Si Kα Ni Lα
3 0.931 0.843 0.879 0.832 0.882
5 0.963 0.885 0.928 0.951 0.953
10 0.977 0.902 0.948 0.988 0.983
20 0.979 0.906 0.953 0.996 0.989

Normalized intensities of C Kα, Si Kα, N Kα, and O Kα lines of X-rays

Figure 1730. Normalized intensities of C Kα, Si Kα, N Kα, and O Kα lines of X-rays.

 

 

 

 

 

 

[1] D. G. Rickerby, Barriers to energy dispersive spectrometry with low energy X-rays, Microbeam and Nanobeam Analysis, edited by Daniele Benoi, 1996.

 

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