Spatial Resolution of EFTEM Affected by Specimen Thickness
- Practical Electron Microscopy and Database -
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If the TEM specimen is very thick, both the chromatic and spherical aberrations affect the spatial resolution of EFTEM imaging significantly. For instance, for thick specimen the chromatic broadening (Δdc) is about 2.5 nm at β = 10 mrad, Cc = 1 mm, ΔE = 50 eV, and E0 = 200 keV, while for thin specimen, Δdc will be normally ≤ 0.2 nm for most microscope configurations (see details in page3384). For thick specimen, assuming the spherical aberration constant is 0.7 mm, collection semi-angle 15 mrad, the ΔdS will be ~3.8 nm, while for thin specimen ΔdS is normally negligible for most microscope configurations (see details in page1941).

 

 

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