Nitrides
- Practical Electron Microscopy and Database -
- An Online Book -


http://www.globalsino.com/EM/  


===============================================================================================================================================

 

 

Table 2007a. Metallization selections in ICs.

Application
Selection
Gates, interconnection, and
contacts
Polysilicon, refractory metal silicides (e.g. MoSix, TaSix, WSix, and TiSix), nitrides,aluminum, copper, and/or refractory metals.
Diffusion barrier layer
Ti, TiN, Ta, TaN, Ti-W alloy, and/or silicides
Top level
Aluminum, and/or copper
Metallization on silicon
Silicides, tungsten, aluminum, and/or copper

Table 2007b. Important nitrides in alloy engineering.

Chemical element

Main nitrides
Aluminum
AlN
Boron
BN
Chromium
CrN
Cr2N
Hafnium
HfN
Hf3N2
Hf4N3
Iron
Fe4N
Fe2N
Magnesium
Mg3N
Manganese
Mn4N
Mn2N
Mn3N
Molybdenum
MoN
Mo2N
Niobium
NbN
Nb2N
Nb4N3
Silicon
Si3N4
Tantalum
TaN
Ta2N
Ta3N5
Titanium
TiN
Ti2N
Tungsten
WN
W2N
Vanadium
VN
V2N
Zirconium
ZrN

Table 2007c. Nitride parameters.

Nitrides
Electrical resistivity (µΩ-cm)
Dielectric constant (K) Band gap (eV) Conduction band offset on Si (eV) Superconductive transition temp (K) Magnetic susceptibility
(emu/mol)
Density gm/cm3
Room Temp. Fracture Toughness MPa. m1/2
Hall constant (cm3/A•s) Thermal expansion (ppm/°C) Thermal conductivity (W/m·°C) Specific heat (Cp, J/mol•K) Debye Temp.
(K)
Melting point (°C)
Heat of Formation (-ΔHf) at 298 K (kJ/g-atom metal)
Crystal Structure
Lattice constant (nm) Space group Pearson symbol
Molecular weight
Flexural strength (MPa) Poisson's ratio Vickers hardness (GPa) Young's modulus (GPa) Modulus of elasticity (GPa) Friction coefficient

Transverse rupture strength (MPa)

Index of refraction (3 eV) Max working temp (°C) Oxidation resistance
Chemical resistance
Color Properties
Major applications
AlN
1019
8.9
6.2
3.257
Δa/a=4.2
Δc/c=5.3
Polycrystal: 200
Single crystal: 320
Wurtzite a = 0.3112; c = 0.4982         0.24 18-25   260-350     2.15±0.05            
AlN
5.11
4.2-4.3 140-230
Zinc blende a = 0.438       343-390   12         2.15±0.05            
BN
4.1
3.7  
              40 660                    
CrN
10.3 84
1810
              11 400   0.4-0.5     600-700     Silver-gray

Good adhesion; good corrosion; good oxidation resistance

Machining copper; metal forming; plastic molding
HfN
   
                                Yellow-green    
NbN
10.1  
2204
              14 480                    
Si3N4
6.0-7.0
5.3
2.4
3.27
3.0  
                      100              
TaN
   
                                Yellow-silver    
TiAlN
   
                    0.4 - 0.7     700-800 800 °C   Violet-gray Excellent oxidation resistance A multi-layer coating designed for a wide range of carbide and high speed steel tooling; excellent for machining cast iron, stainless steel, nickel-based high temperature alloys and titanium alloys; designed for high speed and semi-dry or dry machining operations
TiAlCN
   
                            600 °C        
TiCxNy
8 20-30
              24.5-29.4     0.3 - 0.4     400-450 400 °C   Blue-grey High hardness; good wear resistance; enhanced toughness; high lubricity; stable and inert stable lubricant

Mechanically stressed cutting; high speed cutting

TiN
9.4 29
2949
              20 440   0.4-0.5     550-600 600 °C   Yellow-golden to gray-silver   Machining of iron-based materials; metal forming; plastic molding
TiN/AlN
   
                            950 °C        
TiNx
(x = 0.6 to 1.1)
20±10
5.6
+38x10-6
5.40
2950
-0.7±0.2 x 10-4
9.35 11-67
33.74
636
338
fcc B1 (NaCl)
0.424 Fm3m cF8
61.87
  0.25 18-40   251-450         Chemical stable at room temperature. Slowly attacked by concentrated acid solution with rising temperature
Begins to oxidize in air at approximately 800 °C
Gold  
Electrode
Ti3AlN
   
Cubic 0.41121                                  
Ti3Al2N2
   
  0.29875                                  

Ti2N

   
Tetragonal a = 0.4945; c = 0.3034                                  
Ti3N1.29
   
Rhombohedral a = 0.2980; c = 2.1664                                  
VN
8.0  
              15 460                    
WN
   
                          400          
ZrN
   
                                Pale golden    
Zr(CxN1-x) (for x = 0.05~0.20)
   
                                Golden    
   
     
                   
   

 

 

 

 

 

 

 

===============================================================================================================================================