PtSi in ICs
- Practical Electron Microscopy and Database -
- An Online Book -

http://www.globalsino.com/EM/  



 
This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
 

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Table 2909. Properties of PtSi materials.

Properties
PtSi
Thin film resistivity
(μΩ − cm)
28-35
Melting point (°C)
1229
Sintering temperature (°C)
250-400
Stable on Si up to (°C)
~750
Reaction with Al at (°C)
250
nm of Si consumed per nm of
metal
1.12
nm of resulting silicide per nm of metal
1.97
Barrier height to n-Si (eV)
0.84

 

 

 

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