SEM Spatial Resolution Affected by Accelerating Voltage of Electron Beam
- Practical Electron Microscopy and Database -
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Spatial resolution of SEMs can conventionally be improved by increasing the accelerating voltage of the incident electron beam. However, it is also interesting to point out that the resolution of HR-SEM is affected by the delocalization of inelastic scattering, therefore, this resolution should be improved as the accelerating voltage of the incident electron beam is reduced.

 

 

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