HRSEM Image Contrast as Function of Crystal Tilt
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Figure 2934 shows the contrast of high resolution SEM image, as a function of crystal tilt from 0° to 4° (0-67 mrad), taken from a (100) SrTiO3 crystal in Cs-corrected SEM mode. A small crystal tilt (e.g. 0-15 mrad) can reduce the contrast of high resolution SEM images by a factor of 2 because of dynamical scattering. Moreover, this effect also depends on the sample thickness, which was 15 nm here.

STEM-ADF image of SrTiO3 (100) as a function of crystal tilt

Figure 2934. SEM image of (100) SrTiO3 as a function of crystal tilt. (a)  0°; (b)  1°; (c)  2°; (d) 3°; and (e) 4°. The tilt axis as marked in (d) is near the [110]. Adapted from [1]






[1] H. Inada, D.Su, R. F. Egerton, M.Konno, L.Wu, J.Ciston, J.Wall, Y.Zhu, Atomic imaging using secondary electrons in a scanning transmission electron microscope: Experimental observations and possible mechanisms, Ultramicroscopy 111(2011)865–876.




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