EDS and WDS Measurements of Titanium
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The EDS profile of BaTiO3 system shown in Figure 3108a presents an example of EDS peak overlap. For EDS measurements, the typical FWHM (full width at half maximum) intensity of the primary Ti lines (Kα 4.508 keV and Kβ 4.931 keV) is 160 eV at 30 kV of accelerating voltage. However, the FWHM of the WDS peaks is only a few eV because the energy resolution of the wavelength spectrometer is 5-10 eV. In this case, peak overlap in WDS is not a problem.

EDS and WDS profiles of BaTiO3

Figure 3108a. EDS and WDS profiles of BaTiO3. The green spectrum presents a standard EDS of of BaTiO3, while the red one presents a standard WDS. EDS shows the overlapped Ba Lα-Ti Kα and Ba Lβ1-Ti Kβ peaks.

Figure 3108b shows the deconvolution of an EDX spectrum with peak overlaps, taken from a material that contains O, Ti, N, and C elements.

Deconvolution of an EDX spectrum with peak overlaps

Figure 3108b. Deconvolution of an EDX spectrum with peak overlaps. [1]

Figure 3108c shows a deconvoluted X-ray spectrum taken from a material containing Ba, Ti, Ce, and Fe elements. The different colored peaks represent the contribution of the various elements. The grey area is the background corrected spectrum which is the sum of all the deconvoluted lines.

Deconvoluted X-ray spectrum taken from a material containing Ba, Ti, Ce, and Fe elements

Figure 3108c. Deconvoluted X-ray spectrum taken from a material containing Ba, Ti, Ce, and Fe elements. [2]

With automatic elemental identification of NSS software, Ce cannot be identified. Instead, the software incorrectly suggests Ti, Fe, Co, Os, and Pb everywhere in elemental maps.

 

 

 

 

 

 

 

 

 

 

 

[1] J. Berlin, T. Salge, M. Falke, and D. Goran, Recent Advances in EDS and EBSD Technology: Revolutionizing the Chemical Analysis of Chondritic Meteorites at the Micro- and Nanometer Scale, 42nd Lunar and Planetary Science Conference, 2723, (2011).
[2] T. Salge, R. Neumann, C. Andersson, M. Patzschke, Advanced Mineral Classification Using Feature Analysis and Spectrum Imaging with EDS, 23rd International Mining Congress & Exhibition of Turkey, 16-19 April, 357, 2013.

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