Electron microscopy
Killer Particles Causing IC Failure
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   http://www.globalsino.com/EM/        

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


Killer particles causing IC failure are normally large in size, and along with missing patterns. These particles are normally the root causes of most cluster defects, can be induced by a tool or a process, and are usually recognized by in-line optical metrology. High particle counts are normally caused by a tool malfunction. Particles smaller than 1 µm are normally not detected by means of optical inline metrology immediately after they are deposited; instead, they are observed when the particle size is magnified by subsequently deposited layers, which makes them visible to inline defect metrology tools.



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