Electron microscopy
 
Killer Particles Causing IC Failure
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   http://www.globalsino.com/EM/        

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
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Killer particles causing IC failure are normally large in size, and along with missing patterns. These particles are normally the root causes of most cluster defects, can be induced by a tool or a process, and are usually recognized by in-line optical metrology. High particle counts are normally caused by a tool malfunction. Particles smaller than 1 µm are normally not detected by means of optical inline metrology immediately after they are deposited; instead, they are observed when the particle size is magnified by subsequently deposited layers, which makes them visible to inline defect metrology tools.

 

 

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