Electron microscopy
 
Buried Defects in ICs
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   http://www.globalsino.com/EM/        

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
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For integrated circuits (ICs), some buried defects such as killer particle defects and buried defects under several layers of interconnects are visible under optical microscopes, while some are only visible in scanning electron microscopes (SEM).

 

 

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The book author (Yougui Liao) welcomes your comments, suggestions, and corrections, please click here for submission. If you let book author know once you have cited this book, the brief information of your publication will appear on the “Times Cited” page.