Electron microscopy
Missing Pattern Failure in IC Chips
- Practical Electron Microscopy and Database -
- An Online Book -
Microanalysis | EM Book                                                                                   http://www.globalsino.com/EM/        

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.


Most missing patterns in IC chips are normally visible under optical microscope if the relevant layers are exposed by de-processing, while others are only visible under scanning electron microscope (SEM) due to smaller features.



The book author (Yougui Liao) welcomes your comments, suggestions, and corrections, please click here for submission. If you let book author know once you have cited this book, the brief information of your publication will appear on the “Times Cited” page.