Spatial Resolution of EFTEM Mapping
Affected by Collection Angle
- Practical Electron Microscopy and Database -
- An Online Book -

http://www.globalsino.com/EM/ 



 
This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
 

=================================================================================

In EFTEM mapping, the spatial resolution depends on the chromatic broadening (Δdc) in the objective lens. Chromatic broadening is determined by the energy range (ΔE), the chromatic aberration coefficient of the objective lens Cc, the accelerating voltage V0, and the collection angle (β),

         Chromatic broadening  in PEELS ----------------------- (3382)

For instance, the chromatic broadening (Δdc) is about 2.5 nm at β = 10 mrad, Cc = 1 mm, ΔE = 50 eV, and V0 = 200 keV. This broadening disadvantage does not exist in conventional STEM-based EELS. To minimize it, a small collection angle can be used.

 

 

=================================================================================

The book author (Dr. Liao) welcomes your comments, suggestions, and corrections, please click here for submission. You can click How to Cite This Book to cite this book. If you let Dr. Liao know once you have cited this book, the brief information of your publication will appear on the “Times Cited” page.



 
 
 
Copyright (C) 2006 GlobalSino, All Rights Reserved