This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.
 

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The spatial resolution for both the EDS and EELS analyses is improved with the accelerating voltages, since the incident electron beam spread decreases with an increase in the accelerating voltage.

Based on the beam spreading theory, to improve the EDS spatial resolution, one need to use as thin a specimen, as small a probe diameter and as high an accelerating voltage as possible.