The inelastic scattering of electrons occurs at smaller angles than that for elastic scattering. Figure 3819a shows angular distributions of various scattered electrons as a function of scattering angle in EMs.
|Figure 3819a. (a) Elastic scattering of electrons with crystalline and amorphous specimens, (b) Phonon scattering, (c) Inner-shell ionization losses, and (d) Plasmon losses.
Figure 3819b shows an example of angular-resolved electron scattering profiles in logarithmic scale. The reference spectrum (vacuum) in blue is dominated by unscattered electrons in the range −4 to 4 mrad. Due to the scattering of the incident electrons with a rhenium (Re) TEM specimen, the modified spectrum in red was formed.
|Figure 3819b. An example of angular-resolved electron scattering profiles of electrons in vacuum and Re film in logarithmic scale.
 Konstantin Iakoubovskii and Kazutaka Mitsuishi, Elastic scattering of 200 keV electrons in elemental solids: experimental observation of atomic-number-dependent oscillatory behavior, J. Phys.: Condens. Matter 21 (2009) 155402.