Electron Beam Induced Current (EBIC)
- Practical Electron Microscopy and Database -
- An Online Book -

http://www.globalsino.com/EM/  



 

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.

 

=================================================================================

Electron beam induced current (EBIC) was the first application of charging-induced effects in SEM. This generated current is formed by the separation of electron-hole pairs excited by a high energy e-beam (electron-beam) irradiating on semiconductor devices. For instance, the distinction at cross-sectional surfaces between n- and n+ regions was observed on a Si (silicon) wafer [1]. EBIC measurements demonstrated that shallow states exist at Σ3 coincidence site lattice (CSL) grain boundaries. [2]

 

 

 

[1] Kato, T., Matsukawa, T., Koyama, H., Fujikawa, K. and Shimizu, R. (1975) Scanning electron microscopy of charging effect on silicon. J. Appl. Phys., 46, 2288 - 2292.
[2] A. Buis, Y. S. Oei and F. W. C. Schapink: Trans. Japan Inst. Metals Suppl. 27 (1986) 221–228.

 

=================================================================================

The book author (Dr. Liao) welcomes your comments, suggestions, and corrections, please click here for submission. You can click How to Cite This Book to cite this book. If you let Dr. Liao know once you have cited this book, the brief information of your publication will appear on the “Times Cited” page. This appearance can help advertise your publication.



 
 
 
Copyright (C) 2006 GlobalSino, All Rights Reserved