This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.

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Figure 3834. shows the schematic illustration of SE (secondary electron) energy spectroscopy. The SE energy spectroscopy, which is the relative SE number as a function of the SE energy (N(E)), is characterized by the most probable energy (eV_mp) and the full width at half maximum (FWHM). The spectroscopy generally varies in a range with the composition of the materials and surface condition.

Figure 3834. Schematic illustration of SE (secondary electron) energy spectroscopy.

Table 3834 presents the most probable energy (eV_mp) and the full width at half maximum (FWHM) of SE energy spectroscopy various materials.

Table 3834. The eV_mp and FWHM of SE energy spectroscopy various materials.

	eVmp	FWHM	Reference
Typical	2 -5
SiO2	2	7	[1]

[1] Schreiber, E. and Fitting, H. J. (2002) Monte Carlo simulation of secondary electron emission from the insulator SiO2. J. Electron Spectrosc.
Relat. Phenom., 124, 25 - 37.