Full Width at Half Maximum (FWHM) of Emitted SE Distribution
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Figure 3834. shows the schematic illustration of SE (secondary electron) energy spectroscopy. The SE energy spectroscopy, which is the relative SE number as a function of the SE energy (N(E)), is characterized by the most probable energy (eVmp) and the full width at half maximum (FWHM). The spectroscopy generally varies in a range with the composition of the materials and surface condition.

Schematic illustration of SE (secondary electron) energy spectroscopy. most probable energy (eVmp) and the full width at half maximum (FWHM)

Figure 3834. Schematic illustration of SE (secondary electron) energy spectroscopy.

Table 3834 presents the most probable energy (eVmp) and the full width at half maximum (FWHM) of SE energy spectroscopy various materials.

Table 3834. The eVmp and FWHM of SE energy spectroscopy various materials.
FWHM
Reference
Typical 2 -5    
SiO2 2 7 [1]

                                       * Depth is the depth from the specimen surface

 

[1] Schreiber, E. and Fitting, H. J. (2002) Monte Carlo simulation of secondary electron emission from the insulator SiO2. J. Electron Spectrosc.
Relat. Phenom., 124, 25 - 37.






 

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