“Effective” Interaction Volume for EELS Measurements in TEM
- Practical Electron Microscopy and Database -
- An Online Book -

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This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.

 

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As shown in Figure 3919, due to the geometry of EELS signal collection, the EELS “effective” interaction volume is smaller than the actual interaction volume of the election beam with the materials in the TEM specimen. This is also a reason why EELS has better spatial resolution than EDS.

Schematic illustration of EELS “effective” interaction volume.

Figure 3919. Schematic illustration of EELS “effective” interaction volume.

 

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