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Displacement energy (E_d) for bulk diffusion in conducting materials induced by electron irradiation is from 0.5 to 1.5 eV, while it for surface diffusion is < 1 eV. Energetic electron induced elastic scattering can also enhance diffusion of atoms at the surface [1] or vacancy migration in the bulk, which have relatively high cross sections and thus require energy of the order of 1eV or less.

[1] Y. Ma, L.D.Marks,in: G. W. Bailey (Ed.), Proc. 44^th Ann. Meet. Electron Microsc. Soc.Am., San Francisco Press,San Francisco, 1986.