Maximum Ranges of Primary Electron Beam in EMs
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The maximum ranges of primary electron beam at high, medium, and low accelerating voltages in EMs are shown in Figure 4469. E0 is the accelerating voltage.

EDS spectra from a 104 nm Al film on the surface of a Si wafer as a function of the incident electron energy

Figure 4469. Schematic showing the maximum primary electron ranges RH, RM, and RL at high, medium,
and low electron beam voltages, respectively, for an Al thin film on Si wafer substrate specimen.



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