Platinum Deposition by FIB
- Practical Electron Microscopy and Database -
- An Online Book -

http://www.globalsino.com/EM/



 

This book (Practical Electron Microscopy and Database) is a reference for TEM and SEM students, operators, engineers, technicians, managers, and researchers.

 

=================================================================================

Methyl cyclopentadienyl trimethyl platinum {(CH3)3Pt(CpCH3)} precursor gas can be used for Pt deposition. The deposited film contains carbon and gallium elements because they exist in the precursor gas or the FIB beam (if a Ga source is used). The C and Ga concentrations are very high so that EDS and EELS can detect them. The EDS results showed that the FIB deposited platinum structures at optimum flux, contain approximately 80% of Pt, 10% of carbon, and 10% of Ga [1].

 

[1] S. K. Tripathi, N. Shukla, V.N. Kulkarni, Nucl. Instrum. Methods B 266 (2008) 1468.

 

=================================================================================

The book author (Yougui Liao) welcomes your comments, suggestions, and corrections, please click here for submission. If you let book author know once you have cited this book, the brief information of your publication will appear on the “Times Cited” page.