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The cross-sections for inelastic scattering are low and are typically 102 to 106 times weaker than elastic ones.Therefore, it is easier to optimize and to obtain elastic scattering signal at low noise level than from inelastic scattering.
Table 2 shows the relative intensities of scattering within the energy windows of different energy losses, for an 80 keV electron beam of 100 units incident on a 35 nm carbon film.
| Table 2. Relative intensities of scattering within the energy windows of different energy losses, for an 80 keV electron beam of 100 units incident on a 35 nm carbon film. (θ: scattering angle) [1] |
| |
Energy loss |
| Scattering angle |
0-10 eV |
10-50 eV |
50-280 eV |
> 280 eV |
| θ < 10 mrad |
34 |
41 |
10 |
0.38 |
| θ > 10 mrad |
6 |
0.7 |
7.1 |
0.95 |
| Total |
100 |
[1] R. F. Egerton, Inelastic scattering of 80 keV electrons in amorphous carbon, Philosophical Magazine, 31:1, 199-215, (1975).
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