Intensity and Imaging Comparison between Elastic and Inelastic Scatterings

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Intensity and Imaging Comparison between Elastic and Inelastic Scatterings

The cross-sections for inelastic scattering are low and are typically 10² to 10⁶ times weaker than elastic ones.Therefore, it is easier to optimize and to obtain elastic scattering signal at low noise level than from inelastic scattering.

Table 2 shows the relative intensities of scattering within the energy windows of different energy losses, for an 80 keV electron beam of 100 units incident on a 35 nm carbon film.

Table 2. Relative intensities of scattering within the energy windows of different energy losses, for an 80 keV electron beam of 100 units incident on a 35 nm carbon film. (θ: scattering angle) [1]

	Energy loss
Scattering angle	0-10 eV	10-50 eV	50-280 eV	> 280 eV
θ < 10 mrad	34	41	10	0.38
θ > 10 mrad	6	0.7	7.1	0.95
Total	100

[1] R. F. Egerton, Inelastic scattering of 80 keV electrons in amorphous carbon, Philosophical Magazine, 31:1, 199-215, (1975).

Practical Electron Microscopy and Database

An Online Book, Second Edition by Dr. Yougui Liao (2006)

Intensity and Imaging Comparison between Elastic and Inelastic Scatterings