EELS Measurement through Multiple Layers
- Practical Electron Microscopy and Database -
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An incident electron beam can penetrate through multiple layers of structures in EELS measurements. This scattering occurs from different types of atoms in the different layers before arriving at the spectrometer. The overall path through which the electrons are scattered through the multiple layers of the structures is thicker than the measuring layer. The additional scattering through the extra layers has deleterious effects of degrading image resolution and decreasing signal-to-noise for the EELS measurement.