Electron microscopy
  
Reliability/Reproducibility of EDS Data & EDS System
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Figure 1228 shows five EDS profiles obtained at the same region of a bulk MoO3 sample. The O and Mo peaks are Gaussian peaks. The measurements were performed at 35.0 µs of time constant, 25kV of accelerating voltage, 100 s of acquisition time, around of 30% of dead time, 100 x of magnification and 11 mm of working distance in a SEM system. Table 1228 lists the chemical composition of MoO3 obtained with O K and Mo L lines. We can know that the composition values of the five profiles are not exactly constant because of the uncertainty of the EDS system at different times.

Five EDS profiles obtained at the same region of a bulk MoO3 sample

Figure 1228. Five EDS profiles obtained at the same region of a bulk MoO3 sample. [1]

 

Table 1228. Chemical composition of MoO3 obtained with O K and Mo L lines. [1]
Measurement O K (Wt%) O %Error Mo L (Wt%) Mo %Error
1
33.44
0.3
66.56
0.1
2
34.04
2.1
65.96
1.0
3
34.16
2.4
65.84
1.2
4
33.75
1.2
66.25
0.6
5
34.48
3.4
65.52
1.7
Average
33.97
1.9
66.03
0.9

 

 

 

 

 

 

[1] Carlos Angeles-Chavez, Jose Antonio Toledo-Antonio and Maria Antonia Cortes-Jacome, Chemical Quantification Mo-S W-Si Ti-V by Energy Dispersive X-Ray Spectroscopy, in X-Ray Spectroscopy, edited by Shatendra K Sharma, 2012.

 

 
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